Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797112 | Plasma treatment apparatus and method of producing semiconductor device using the apparatus | Naoshi Itabashi, Yasunori Goto | 2004-09-28 |
| 6784109 | Method for fabricating semiconductor devices including wiring forming with a porous low-k film and copper | Masaru Izawa | 2004-08-31 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Masaru Izawa, Yasushi Goto +7 more | 2004-01-13 |