Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767838 | Method and apparatus for treating surface of semiconductor | Tatsumi Mizutani, Ryouji Hamasaki, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2004-07-27 |
| 6759253 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Ryoji Nishio, Kazue Takahashi, Nobuyuki Mise | 2004-07-06 |
| 6700090 | Plasma processing method and plasma processing apparatus | Katsumi Setoguchi, Hideyuki Yamamoto | 2004-03-02 |
| 6677244 | Specimen surface processing method | Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more | 2004-01-13 |