Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815365 | Plasma etching apparatus and plasma etching method | Toshio Masuda, Mitsuru Suehiro, Tetsunori Kaji, Saburo Kanai | 2004-11-09 |
| 6759253 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Tetsuo Ono, Ryoji Nishio, Nobuyuki Mise | 2004-07-06 |
| 6759338 | Plasma processing apparatus and method | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Saburou Kanai | 2004-07-06 |
| 6755932 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Mitsuru Suehiro, Hiroshi Kanekiyo, Hideyuki Yamamoto +1 more | 2004-06-29 |
| 6676805 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2004-01-13 |