Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793833 | Etching method of organic insulating film | Michinobu Mizumura, Ryooji Fukuyama, Katsuya Watanabe | 2004-09-21 |
| 6759338 | Plasma processing apparatus and method | Hironobu Kawahara, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2004-07-06 |