Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825617 | Semiconductor processing apparatus | Seiichiro Kanno, Ryoji Nishio, Ken Yoshioka, Hideki Kihara, Hideyuki Yamamoto | 2004-11-30 |
| 6759338 | Plasma processing apparatus and method | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Kazue Takahashi | 2004-07-06 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Tsutomu Tetsuka +3 more | 2004-06-29 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Seiichiro Kanno, Ryoji Nishio, Tsutomu Tetsuka, Junichi Tanaka, Hideyuki Yamamoto +1 more | 2004-04-06 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Seiichiro Kanno, Hironobu Kawahara, Mitsuru Suehiro, Toshio Masuda | 2004-01-13 |