Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759338 | Plasma processing apparatus and method | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2004-07-06 |
| 6755935 | Plasma processing apparatus | Hideyuki Kazumi, Ichiro Sasaki, Kenji Maeda, Tsutomu Tetsuka | 2004-06-29 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Seiichiro Kanno, Mitsuru Suehiro, Saburou Kanai, Toshio Masuda | 2004-01-13 |