Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815365 | Plasma etching apparatus and plasma etching method | Toshio Masuda, Kazue Takahashi, Tetsunori Kaji, Saburo Kanai | 2004-11-09 |
| 6755932 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2004-06-29 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Seiichiro Kanno, Hironobu Kawahara, Saburou Kanai, Toshio Masuda | 2004-01-13 |