Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2004-12-21 |
| 6815365 | Plasma etching apparatus and plasma etching method | Toshio Masuda, Kazue Takahashi, Mitsuru Suehiro, Tetsunori Kaji | 2004-11-09 |