Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2004-12-21 |
| 6812725 | Semiconductor processing apparatus and wafer sensor module | Ryujiro Udo, Manabu Edamura | 2004-11-02 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai +3 more | 2004-06-29 |