Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2004-12-21 |
| 6812725 | Semiconductor processing apparatus and wafer sensor module | Ryujiro Udo, Masatsugu Arai | 2004-11-02 |
| 6793768 | Plasma-assisted processing apparatus | Hideyuki Kazumi, Kazuyuki Ikenaga, Atsushi Ootake | 2004-09-21 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Hideyuki Kazumi, Saburou Kanai, Tsutomu Tetsuka +3 more | 2004-06-29 |