Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833051 | Plasma processing apparatus and method | Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2004-12-21 |
| 6793768 | Plasma-assisted processing apparatus | Manabu Edamura, Kazuyuki Ikenaga, Atsushi Ootake | 2004-09-21 |
| 6755935 | Plasma processing apparatus | Ichiro Sasaki, Kenji Maeda, Tsutomu Tetsuka, Hironobu Kawahara | 2004-06-29 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Saburou Kanai, Tsutomu Tetsuka +3 more | 2004-06-29 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2004-01-13 |