Issued Patents 2004
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-12-07 |
| 6798576 | Lens sheet and method for producing it | Atsushi Nagasawa, Takahiro Kitano, Katsuya Fujisawa, Tatsufumi Watanabe | 2004-09-28 |
| 6789583 | Gas supply apparatus and gas supply method | Takashi Orita, Makoto Echigojima | 2004-09-14 |
| 6776872 | Data processing apparatus for semiconductor processing apparatus | Toshio Masuda, Akira Kagoshima, Shoji Ikuhara, Hideyuki Yamamoto | 2004-08-17 |
| D493445 | Speaker | Takekazu Iijima, Koji Nakane | 2004-07-27 |
| D493161 | Speaker | Takekazu Iijima, Koji Nakane | 2004-07-20 |
| 6747239 | Plasma processing apparatus and method | Hiroyuki Kitsunai, Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2004-06-08 |
| 6745096 | Maintenance method and system for plasma processing apparatus etching and apparatus | Hideyuki Yamamoto, Toshio Masuda, Shoji Ikuhara, Akira Kagoshima | 2004-06-01 |
| 6743733 | Process for producing a semiconductor device including etching using a multi-step etching treatment having different gas compositions in each step | Hiroyuki Kitsunai, Takashi Fujii, Motohiko Yoshigai | 2004-06-01 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2004-05-11 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Seiichiro Kanno, Ryoji Nishio, Tsutomu Tetsuka, Hideyuki Yamamoto, Kazuyuki Ikenaga +1 more | 2004-04-06 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-03-16 |