Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835665 | Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method | Ken Yoshioka, Ryoji Nishio, Tatehito Usui | 2004-12-28 |
| 6759253 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Tetsuo Ono, Ryoji Nishio, Kazue Takahashi | 2004-07-06 |