Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6752579 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2004-06-22 |
| 6752580 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2004-06-22 |
| 6705828 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2004-03-16 |
| 6672819 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2004-01-06 |