Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823589 | Flexibly suspended gas distribution manifold for plasma chamber | Ernst Keller, Wendell T. Blonigan | 2004-11-30 |
| 6825134 | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow | Kam S. Law, Quanyuan Shang, William Harshbarger, Dan Maydan, Soo Young Choi +2 more | 2004-11-30 |
| 6820298 | Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint | Ying Yu, Michael Sugarman | 2004-11-23 |
| 6783118 | Vaporizing reactant liquids for chemical vapor deposition film processing | Visweswaren Sivaramakrishnan | 2004-08-31 |
| 6746198 | Substrate transfer shuttle | Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2004-06-08 |
| 6729944 | Chemical mechanical polishing apparatus with rotating belt | Manoocher Birang, Lawrence Rosenberg, Sasson Somekh | 2004-05-04 |
| 6728989 | Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber | Alexander Lerner, Shou-Sang Chang, Michael Sugarman | 2004-05-04 |
| 6725869 | Protective barrier for cleaning chamber | Alexander Lerner | 2004-04-27 |
| 6688375 | Vacuum processing system having improved substrate heating and cooling | Norman L. Turner, Alan D'Entremont | 2004-02-10 |
| 6679671 | Substrate transfer shuttle having a magnetic drive | Wendell T. Blonigan | 2004-01-20 |
| 6676497 | Vibration damping in a chemical mechanical polishing system | Hung Chih Chen, Shijian Li, Fred C. Redeker, Ramin Emami | 2004-01-13 |