Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823589 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Ernst Keller | 2004-11-30 |
| 6824343 | Substrate support | Shinichi Kurita, Suhail Anwar, Toshio Kiyotake, Hung T. Nguyen | 2004-11-30 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more | 2004-06-08 |
| 6719851 | Lid assembly for opening a process chamber lid and uses therefor | Shinichi Kurita | 2004-04-13 |
| 6679671 | Substrate transfer shuttle having a magnetic drive | John M. White | 2004-01-20 |