Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833717 | Electron beam test system with integrated substrate transfer module | Shinichi Kurita, Emanuel Beer, Benjamin M. Johnston | 2004-12-21 |
| 6824343 | Substrate support | Shinichi Kurita, Wendell T. Blonigan, Suhail Anwar, Toshio Kiyotake | 2004-11-30 |