Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833717 | Electron beam test system with integrated substrate transfer module | Emanuel Beer, Hung T. Nguyen, Benjamin M. Johnston | 2004-12-21 |
| 6824343 | Substrate support | Wendell T. Blonigan, Suhail Anwar, Toshio Kiyotake, Hung T. Nguyen | 2004-11-30 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Wendell T. Blonigan +1 more | 2004-06-08 |
| 6719851 | Lid assembly for opening a process chamber lid and uses therefor | Wendell T. Blonigan | 2004-04-13 |