Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746198 | Substrate transfer shuttle | John M. White, Robin L. Tiner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2004-06-08 |
| 6688375 | Vacuum processing system having improved substrate heating and cooling | John M. White, Alan D'Entremont | 2004-02-10 |