Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6688375 | Vacuum processing system having improved substrate heating and cooling | Norman L. Turner, John M. White | 2004-02-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6688375 | Vacuum processing system having improved substrate heating and cooling | Norman L. Turner, John M. White | 2004-02-10 |