Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823589 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Wendell T. Blonigan | 2004-11-30 |
| 6772827 | Suspended gas distribution manifold for plasma chamber | Quanyuan Shang | 2004-08-10 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Shinichi Kurita, Wendell T. Blonigan +1 more | 2004-06-08 |