Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825134 | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow | Kam S. Law, William Harshbarger, Dan Maydan, Soo Young Choi, Beom Soo Park +2 more | 2004-11-30 |
| 6772827 | Suspended gas distribution manifold for plasma chamber | Ernst Keller | 2004-08-10 |
| 6765178 | Chamber for uniform substrate heating | Janine Kardokus, Akihiro Hosokawa | 2004-07-20 |
| 6676761 | Method and apparatus for dechucking a substrate | William Harshbarger, Robert L. Greene, Ichiro Shimizu | 2004-01-13 |