Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825447 | Apparatus and method for uniform substrate heating and contaminate collection | Sam Kim, Dong Choon Suh | 2004-11-30 |
| 6773562 | Shadow frame for substrate processing | Makoto Inagawa, Richard E. Demaray | 2004-08-10 |
| 6765178 | Chamber for uniform substrate heating | Quanyuan Shang, Janine Kardokus | 2004-07-20 |