Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825447 | Apparatus and method for uniform substrate heating and contaminate collection | Sam Kim, Akihiro Hosokawa | 2004-11-30 |
DS
Dong Choon Suh
Overall (2004): #231,270 of 270,089Top 90%
1
Patents 2004