Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827826 | Planar optical devices and methods for their manufacture | Kai-An Wang, Ravi Mullapudi, Douglas P. Stadtler, Hongmei Zhang, Rajiv Pethe | 2004-12-07 |
| 6821562 | Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus | Manuel J. Herrera, David F. Eline, Chandra Deshpandey | 2004-11-23 |
| 6773562 | Shadow frame for substrate processing | Makoto Inagawa, Akihiro Hosokawa | 2004-08-10 |