Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825134 | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow | Quanyuan Shang, William Harshbarger, Dan Maydan, Soo Young Choi, Beom Soo Park +2 more | 2004-11-30 |
| 6818529 | Apparatus and method for forming a silicon film across the surface of a glass substrate | Robert Z. Bachrach | 2004-11-16 |