Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827987 | Method of reducing an electrostatic charge on a substrate during a PECVD process | Tae Kyung Won, Takako Takehara, William Harshbarger | 2004-12-07 |
| 6825134 | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow | Kam S. Law, Quanyuan Shang, William Harshbarger, Dan Maydan, Beom Soo Park +2 more | 2004-11-30 |