Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827987 | Method of reducing an electrostatic charge on a substrate during a PECVD process | Tae Kyung Won, Soo Young Choi, Takako Takehara | 2004-12-07 |
| 6825134 | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow | Kam S. Law, Quanyuan Shang, Dan Maydan, Soo Young Choi, Beom Soo Park +2 more | 2004-11-30 |
| 6676761 | Method and apparatus for dechucking a substrate | Quanyuan Shang, Robert L. Greene, Ichiro Shimizu | 2004-01-13 |