Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833052 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Tetsuya Ishikawa, Alan W. Collins | 2004-12-21 |
| 6832948 | Thermal preconditioning fixed abrasive articles | Manoocher Birang, Ramin Emami, Shijian Li | 2004-12-21 |
| 6796880 | Linear polishing sheet with window | Manoocher Birang, Shijian Li, Sasson Somekh | 2004-09-28 |
| 6797074 | Wafer edge cleaning method and apparatus | Brian J. Brown, Michael Sugarman | 2004-09-28 |
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2004-09-14 |
| 6783432 | Additives for pressure sensitive polishing compositions | Jui-Lung Li, Yuchun Wang, Rajeev Bajaj | 2004-08-31 |
| 6780773 | Method of chemical mechanical polishing with high throughput and low dishing | Shijian Li, Jui-Lung Li, Shi-Ping Wang, Gary Lam, David H. Mai | 2004-08-24 |
| 6739951 | Method and apparatus for electrochemical-mechanical planarization | Lizhong Sun, Stan Tsai | 2004-05-25 |
| 6676497 | Vibration damping in a chemical mechanical polishing system | Hung Chih Chen, John M. White, Shijian Li, Ramin Emami | 2004-01-13 |