Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Liang-Yuh Chen, Lizhong Sun, Shijian Li, Feng Q. Liu, Rashid Mavliev +2 more | 2004-11-23 |
| 6739951 | Method and apparatus for electrochemical-mechanical planarization | Lizhong Sun, Fred C. Redeker | 2004-05-25 |
| 6709316 | Method and apparatus for two-step barrier layer polishing | Lizhong Sun, Shijian Li | 2004-03-23 |