Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833052 | Deposition chamber and method for depositing low dielectric constant films | Yaxin Wang, Fred C. Redeker, Tetsuya Ishikawa, Alan W. Collins | 2004-12-21 |
| 6832948 | Thermal preconditioning fixed abrasive articles | Manoocher Birang, Ramin Emami, Fred C. Redeker | 2004-12-21 |
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Feng Q. Liu, Rashid Mavliev +2 more | 2004-11-23 |
| 6796880 | Linear polishing sheet with window | Fred C. Redeker, Manoocher Birang, Sasson Somekh | 2004-09-28 |
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2004-09-14 |
| 6780773 | Method of chemical mechanical polishing with high throughput and low dishing | Jui-Lung Li, Shi-Ping Wang, Gary Lam, David H. Mai, Fred C. Redeker | 2004-08-24 |
| 6709316 | Method and apparatus for two-step barrier layer polishing | Lizhong Sun, Stan Tsai | 2004-03-23 |
| 6676497 | Vibration damping in a chemical mechanical polishing system | Hung Chih Chen, John M. White, Fred C. Redeker, Ramin Emami | 2004-01-13 |