Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana, Yongqi Hu +6 more | 2004-09-14 |
| 6780773 | Method of chemical mechanical polishing with high throughput and low dishing | Shijian Li, Jui-Lung Li, Shi-Ping Wang, Gary Lam, Fred C. Redeker | 2004-08-24 |