Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rahul Surana, Yongqi Hu +6 more | 2004-09-14 |
| 6783432 | Additives for pressure sensitive polishing compositions | Jui-Lung Li, Yuchun Wang, Fred C. Redeker | 2004-08-31 |