Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2004-09-14 |
| 6783432 | Additives for pressure sensitive polishing compositions | Yuchun Wang, Rajeev Bajaj, Fred C. Redeker | 2004-08-31 |
| 6780773 | Method of chemical mechanical polishing with high throughput and low dishing | Shijian Li, Shi-Ping Wang, Gary Lam, David H. Mai, Fred C. Redeker | 2004-08-24 |