Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776694 | Methods for carrier head with multi-part flexible membrane | Steven M. Zuniga, Ming Kuie Tseng | 2004-08-17 |
| 6764387 | Control of a multi-chamber carrier head | — | 2004-07-20 |
| 6722965 | Carrier head with flexible membranes to provide controllable pressure and loading area | Steven M. Zuniga, Ming Kuie Tseng | 2004-04-20 |
| 6705932 | Carrier head for chemical mechanical polishing | Steven M. Zuniga | 2004-03-16 |
| 6676497 | Vibration damping in a chemical mechanical polishing system | John M. White, Shijian Li, Fred C. Redeker, Ramin Emami | 2004-01-13 |