Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835125 | Retainer with a wear surface for chemical mechanical polishing | Ming-Kuei Tseng, Michael W. Richter | 2004-12-28 |
| 6776692 | Closed-loop control of wafer polishing in a chemical mechanical polishing system | Manoocher Birang | 2004-08-17 |
| 6776694 | Methods for carrier head with multi-part flexible membrane | Hung Chih Chen, Ming Kuie Tseng | 2004-08-17 |
| 6722965 | Carrier head with flexible membranes to provide controllable pressure and loading area | Hung Chih Chen, Ming Kuie Tseng | 2004-04-20 |
| 6705932 | Carrier head for chemical mechanical polishing | Hung Chih Chen | 2004-03-16 |