Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6832948 | Thermal preconditioning fixed abrasive articles | Ramin Emami, Shijian Li, Fred C. Redeker | 2004-12-21 |
| 6811466 | System and method for in-line metal profile measurement | Boguslaw A. Swedek, Nils Johansson, Andreas Norbert Wiswesser | 2004-11-02 |
| 6796880 | Linear polishing sheet with window | Fred C. Redeker, Shijian Li, Sasson Somekh | 2004-09-28 |
| 6776692 | Closed-loop control of wafer polishing in a chemical mechanical polishing system | Steven M. Zuniga | 2004-08-17 |
| 6729944 | Chemical mechanical polishing apparatus with rotating belt | Lawrence Rosenberg, Sasson Somekh, John M. White | 2004-05-04 |
| 6719818 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Nils Johansson, Allan Gleason | 2004-04-13 |
| 6676717 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Allan Gleason | 2004-01-13 |