Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831742 | Monitoring substrate processing using reflected radiation | Zhifeng Sui, Hongqing Shan, Hamid Noorbakhsh, Yu Guan | 2004-12-14 |
| 6811466 | System and method for in-line metal profile measurement | Boguslaw A. Swedek, Andreas Norbert Wiswesser, Manoocher Birang | 2004-11-02 |
| 6813534 | Endpoint detection in substrate fabrication processes | Zhifeng Sui, Paul Luscher, Michael Welch | 2004-11-02 |
| 6719818 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Allan Gleason | 2004-04-13 |