Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831742 | Monitoring substrate processing using reflected radiation | Zhifeng Sui, Nils Johansson, Hamid Noorbakhsh, Yu Guan | 2004-12-14 |
| 6829056 | Monitoring dimensions of features at different locations in the processing of substrates | Michael Barnes, John D. Holland, II, Bryan Pu, Mohit Jain, Zhifeng Sui +5 more | 2004-12-07 |
| 6797189 | Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon | Hoiman Hung, Joseph P. Caulfield, Michael R. Rice, Kenneth S. Collins, Chunshi Cui | 2004-09-28 |
| 6773544 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Siamak Salimian, Paul Luscher +1 more | 2004-08-10 |
| 6686293 | Method of etching a trench in a silicon-containing dielectric material | Yunsang Kim, Kenny L. Doan, Claes Bjorkman | 2004-02-03 |