Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829056 | Monitoring dimensions of features at different locations in the processing of substrates | Michael Barnes, Hongqing Shan, Bryan Pu, Mohit Jain, Zhifeng Sui +5 more | 2004-12-07 |