Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829056 | Monitoring dimensions of features at different locations in the processing of substrates | Michael Barnes, John D. Holland, II, Hongqing Shan, Mohit Jain, Zhifeng Sui +5 more | 2004-12-07 |
| 6825618 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Hongching Shan, Claes Bjorkman, Kenny L. Doan, Mike Welch, Richard R. Mett | 2004-11-30 |
| 6797639 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Hongching Shan, Claes Bjorkman +3 more | 2004-09-28 |
| 6787475 | Flash step preparatory to dielectric etch | Zhuxu Wang, Jingbao Liu, Claes Bjorkman | 2004-09-07 |
| 6716302 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Hongching Shan, Claes Bjorkman +3 more | 2004-04-06 |
| 6689249 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Kuang-Han Ke, Hongching Shan, James C. Wang, Henry Fong, Zongyu LI +1 more | 2004-02-10 |