Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797639 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Bryan Pu, Hongching Shan, Claes Bjorkman +3 more | 2004-09-28 |
| 6773544 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Hamid Noorbakhsh, Hongqing Shan, Siamak Salimian, Paul Luscher +1 more | 2004-08-10 |
| 6716302 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Bryan Pu, Hongching Shan, Claes Bjorkman +3 more | 2004-04-06 |