Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831742 | Monitoring substrate processing using reflected radiation | Zhifeng Sui, Hongqing Shan, Nils Johansson, Yu Guan | 2004-12-14 |
| 6797639 | Dielectric etch chamber with expanded process window | James D. Carducci, Evans Lee, Bryan Pu, Hongching Shan, Claes Bjorkman +3 more | 2004-09-28 |
| 6773544 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Evans Lee, Hongqing Shan, Siamak Salimian, Paul Luscher +1 more | 2004-08-10 |
| 6716302 | Dielectric etch chamber with expanded process window | James D. Carducci, Evans Lee, Bryan Pu, Hongching Shan, Claes Bjorkman +3 more | 2004-04-06 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2004-01-13 |