Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831742 | Monitoring substrate processing using reflected radiation | Hongqing Shan, Nils Johansson, Hamid Noorbakhsh, Yu Guan | 2004-12-14 |
| 6829056 | Monitoring dimensions of features at different locations in the processing of substrates | Michael Barnes, John D. Holland, II, Hongqing Shan, Bryan Pu, Mohit Jain +5 more | 2004-12-07 |
| 6813534 | Endpoint detection in substrate fabrication processes | Paul Luscher, Nils Johansson, Michael Welch | 2004-11-02 |