Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831742 | Monitoring substrate processing using reflected radiation | Zhifeng Sui, Hongqing Shan, Nils Johansson, Hamid Noorbakhsh | 2004-12-14 |
YG
Yu Guan
Overall (2004): #80,574 of 270,089Top 30%
1
Patents 2004