Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822185 | Temperature controlled dome-coil system for high power inductively coupled plasma systems | Paul Luscher, Siamak Salimian, Rolf Guenther, Zhong Qiang Hua, Son M. Phi +1 more | 2004-11-23 |
| 6813534 | Endpoint detection in substrate fabrication processes | Zhifeng Sui, Paul Luscher, Nils Johansson | 2004-11-02 |
| 6797639 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Bryan Pu, Hongching Shan +3 more | 2004-09-28 |
| 6774806 | Monitoring an element of a plant | John L. K. Bannell, David Mark Falconer, Thomas Simon Colaco Osorio | 2004-08-10 |
| 6773544 | Magnetic barrier for plasma in chamber exhaust | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Hongqing Shan, Siamak Salimian +1 more | 2004-08-10 |
| 6716302 | Dielectric etch chamber with expanded process window | James D. Carducci, Hamid Noorbakhsh, Evans Lee, Bryan Pu, Hongching Shan +3 more | 2004-04-06 |
| 6689249 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Kuang-Han Ke, Bryan Pu, Hongching Shan, James C. Wang, Henry Fong +1 more | 2004-02-10 |