Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822185 | Temperature controlled dome-coil system for high power inductively coupled plasma systems | Michael Welch, Paul Luscher, Siamak Salimian, Rolf Guenther, Son M. Phi +1 more | 2004-11-23 |
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Dong Li, Zhengquan Tan, Zhuang Li, Michael Kwan, Bruno Geoffrion +1 more | 2004-11-02 |