Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhengquan Tan, Zhuang Li, Michael Kwan +1 more | 2004-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhengquan Tan, Zhuang Li, Michael Kwan +1 more | 2004-11-02 |