Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhuang Li, Michael Kwan, Bruno Geoffrion +1 more | 2004-11-02 |
| 6740601 | HDP-CVD deposition process for filling high aspect ratio gaps | Dongqing Li, Walter Zygmunt | 2004-05-25 |
| 6715496 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj | 2004-04-06 |
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Dongqing Li, Canfeng Lai, Steve Kim, Alexander Veyster | 2004-01-27 |