Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6755150 | Multi-core transformer plasma source | Michael S. Cox, Peter Loewenhardt, Tsutomu Tanaka, Shamouil Shamouilian | 2004-06-29 |
| 6712020 | Toroidal plasma source for plasma processing | Michael S. Cox, Robert B. Majewski, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2004-03-30 |
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Dongqing Li, Zhengquan Tan, Steve Kim, Alexander Veyster | 2004-01-27 |